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- Particle analysis system
  (이물 검사용 현미경)
   
Superior Metrology

Wider Sample Range

■ Imaging Slopes up to 85°



Razor with an Acute Angle
Thanks to dedicated objective lenses with high numerical apertures and a dedicated optical system that obtains superior performance from a 405 nm laser, the LEXT OLS4100 can reliably measure acute-angled samples that were previously impossible to measure. These capabilities also enable measurement of micro-roughness on an uneven surface.

LEXT-Dedicated Objective Lenses Minimized Aberrations with Dedicated Lens

■ Micro-Profile Measurements with 10 nm Height Resolution


(MPLAPON50XLEXT)
STEP Height standard Type B, PTB-5, Institut für Mikroelektronik, Germany, 6 nm Detection in Height Measurement
With the OLS4100, an impressive X-Y resolution of 0.12 microns is now possible thanks to a short-wavelength 405 nm laser and a highaperture objective lens. As a result, the OLS4100 can perform submicron measurements of a sample's surface. With a precise 0.8 nanometerresolution linear scale and software algorithms such as our original I-Z curve (see page 23), the OLS4100 can resolve height differences of 10 nanometers.


■ Overcoming Reflectance Differences



Diamond Electroplated Tool
Objective Lens: MPlanApoN50xLEXT
The OLS4100 employs a dual confocal system, incorporating two confocal optical light paths. In combination with a highsensitivity detector, this enables the OLS4100 to capture a precise 3D image from a sample consisting of materials with different reflectance characteristics.


■ Applicable to Transparent Layers
Multi-Layer Mode
The LEXT OLS4100's new multilayer mode is capable of recognizing the peaks of reflected light intensities originating from multiple layers. Setting each layer as the focal point makes it possible to observe and measure the upper surface of a transparent sample. This also enables the analysis of multiple layers, measuring the thickness of each layer.



Observation/Measurement of Multiple Layers of Transparent Material
The multi-layer mode facilitates observation and measurement of the transparent layer on the surface of a transparent sample. Even with a transparent resin layer on a glass substrate, the shape and roughness of each layer as well as the thickness of the surface film can be measured.




Industry's First* Double Performance Guarantee

■ Accuracy and Repeatability

The performance of a measuring tool is typically expressed using two different terms: "accuracy," which indicates how close a measurement value is to its true value, and "repeatability," which indicates the degree of variations among repeated measurement values. The OLS4100 is the industry's first* LSM able to assure both accuracy and repeatability.

■ Traceability System

The OLS4100 uses a rigorous system of production for every component. From the objective lens to the laser head, Olympus delivers only the highest-quality systems based on comprehensive inspection to the strictest standards. On delivery, final adjustment and calibration is performed by qualified engineers in the actual measurement environment.

■ Wide Range of Measurement Types

Step Measurement

Surface Roughness Measurement

This mode allows measurement of a step
between any two arbitrary points on a
surface profile. Profile Measurement is
also available.
This mode allows measurement of line
roughness on one line and plane roughness
on the entire surface.

Area/Volume Measurement

Particle Measurement (optional)

With a user-defined threshold level on a
surface profile, this mode allows
measurement of the volume (or area) of a
geometry above or below the threshold level.
This mode enables auto-separation of particles
with the separator function, setting of a
threshold level, and setting of a detection
range within a region of interest.

Geometric Measurement

Film Thickness Measurement (optional)

This mode allows measurement of the
distance between two arbitrary points on
a geometric image. The geometric shape
and angle for circle, rectangle, etc. are
measured.
This mode allows the thickness of a film
on a transparent body to be measured by
detecting changes in refractive index.

Auto Edge Detection/ Measurement (optional)



This mode allows a line width or a diameter
to be measured by automatically detecting
edges in a geometric image. This reduces
uncertainty by eliminating operator error.
 


OLYMPUS Stream (optional)


Workflow Solution for Improved Image Analysis Performance
For grain size analysis or nonmetallic inclusion rating, optional OLYMPUS Stream microimaging software is available, which can be uploaded directly from the OLS4100.


Improved Roughness Measurement


LEXT OLS 4100 Parameters

The LEXT OLS4100 has been developed to represent a new standard of surface roughness measuring. The OLS4100 is calibrated in the same way as contact surface roughness gauges and has the necessary roughness parameters and filters required per ISO and JQA. This allows users with contact surface roughness gauges to obtain output results from the system consistent with their existing instruments, with the advantage of greater speed and non-contact measurement. The OLS4100 has a roughness-specific mode enabling roughness profile measurement for sample lengths up to 100mm with an automatic line stitching function. The OLS4100 comes with the same Surface Profile Parameters as contact-type surface roughness gauges, offering compatible operability and measurement results.


Primary Profile

Pp, Pv, Pz, Pc, Pt, Pa, Pq, Psk, Pku, Psm, PΔq, Pmr(c), Pδc, Pmr

Roughness Profile

Rp, Rv, Rz, Rc, Rt, Ra, Rq, Rsk, Rku, Rsm, RΔq, Rmr(c),Rδc, Rmr, RZJIS, Ra75

Waviness Profile

Wp, Wv, Wz, Wc, Wt, Wa, Wq, Wsk, Wku, Wsm, WΔq, Wmr(c), Wδc, Wmr

Bearing Area Curve

Rk, Rpk, Rvk, Mr1, Mr2

Motif

R, Rx, AR, W, Wx, AW, Wte

Roughness Profile (JIS 1994)

Ra(JIS1994), Ry, Rz(JIS1994), Sm, S, tp

Others

R3z, P3z, PeakCount


Accommodating Next-Generation Parameters
The OLS4100 comes with roughness (3D) parameters conforming to ISO25178 for reliable evaluation of the planar area.

Amplitude Parameters

Sq, Ssk, Sku, Sp, Sv, Sz, Sa


Functional Parameters

Smr(c), Sdc(mr), Sk, Spk, Svk, SMr1, SMr2, Sxp


Volumetric Parameters

Vv(p), Vvv, Vvc, Vm(p), Vmp, Vmc

Lateral Parameters

Sal, Str


LEXT OLS4100 performance is comparable with results of a sur face roughness gauge.
surface roughness gauge


■ Micro Roughness
Contact surface roughness gauges cannot measure micro surface contours less than the stylus tip diameter. The OLS4100 can measure the surface roughness of micro geometries at high resolution due to a minute laser spot diameter.



■ Non-Contact Measurement
Since a contact surface roughness gauge uses a hard needle-shaped stylus, it is more likely to scratch the surface of a soft specimen, damaging or deforming it. With adhesive specimens, on the other hand, the stylus can attach to the specimen and be damaged when pulled loose, making it impossible to obtain correct results. The OLS4100, a noncontact laser microscope, can perform accurate surface roughness measurement regardless of surface texture conditions.


Polymer Film 3D image


Soft Specimen


Adhesive Specimen

■ Measurement of Features at the Micron Level
Surface roughness gauges cannot measure micron-level features since their styli are not able to access these areas. The OLS4100 can correctly identify a measuring position and easily perform roughness measurement of a target micro area.

Bonding Wires



High-Quality Imaging

Crystal-Clear 3D Color Images


■ Three Types of Integrated Images

The LEXT OLS4100 can acquire three different types of information at the same time: a true-color optical microscope image, a laser microscope image, and height map. The OLS4100 makes it possible to capture an optical microscope image consisting of in-focus pixels only and integrate them with a true-color optical microscope image containing height information.
Real-Color 3D Image  


Confocal 3D Laser Image Height Map


■ Natural Color Reproduction
The OLS4100 uses a white LED light and a high-color-fidelity CCD camera to generate clear, natural-looking color images, comparable to those obtained with high-grade optical microscopes.


2D Color Image (Inkjet Dots on Paper,
Objective Lens 20x)
3D Color Image (Inkjet Dots on Paper,
Objective Lens 20x)



Realistic Surface Reproduction, Laser DIC (Differential Interference Contrast)
Differential Interference Contrast (DIC) is an observation method used to visualize nanometer micro surface contours, which normally lie far beyond the resolving power of a laser microscope. Thanks to its DIC laser mode, the LEXT OLS4100 allows you to obtain live images comparable to those of an electron microscope under relatively low power magnifications.


Laser Image with No DIC (Polymer Film) Laser Image with DIC (Polymer Film)


Laser Image without DIC (5x Objective Lens)
STEP Height standard Type B, PTB-5, Institut für Mikroelektronik, Germany
Laser Image with DIC (5x Objective Lens)
STEP Height standard Type B, PTB-5, Institut für Mikroelektronik, Germany,
Actual Height of the Feature : 6 nm



Optimized Balance Between Brightness and Contrast, HDR (High Dynamic Range) Imaging
The OLS4100's High Dynamic Range (HDR) function combines several optical microscope images captured using different exposures. Brightness, contrast, texture, and saturation are controlled individually so that HDR creates images with a wide dynamic range. This enables clear visualization of a color image, especially for samples lacking texture.


Color Image without HDR
(Super-Density Fabric, Objective Lens 20x, Zoom 1x)
Color Image with HDR
(Super-Density Fabric, Objective Lens 20x, Zoom 1x)



Algorithm

Realistic Surface Reproduction, Laser DIC (Differential Interference Contrast)



Hybrid Vibration-Dampening Mechanism
To eliminate external influences on measurement and imaging, the OLS4100 incorporates a hybrid vibrationdampening mechanism using coil springs and dampening rubber to stabilize the operating environment. This eliminates the need for a dedicated vibration-dampening stand, allowing measurements on any desktop.



Realistic Surface Reproduction, Laser DIC (Differential Interference Contrast)

■ Easy Three-Step Process
With the LEXT OLS4100, observation or measurement begins immediately once the sample is placed on the stage. Thanks to our easy three-step "Imaging, Measurement and Reports" process, measurement procedures can be quickly mastered, even by those not familiar with laser microscopy.



■ Keeping Track of the Sample

Macro Map Functionality

The OLS4100's macro map function allows wide-field image display of a sample under low magnification, with a rectangular observation marker on the macro sample image. The field of view can be set up to 21 times wider than the conventional view. When used together with the motorized six-lens nosepiece, the macro map function allows smooth, convenient, one-click operation for stage movement and magnification. Accurate parfocality and objective lens centering can be preset and synchronized with one-click stage movement and magnification.

Two stitching methods are available for scanning large areas: Manual mode for live image acquisition and Automatic mode for faster image acquisition. Operation is quick and simple—2D stitching starts automatically at the touch of a single button, and wide area images are acquired immediately. The stitching size is available from five steps in 3x3, 5x5, 7x7, 9x9, and 21x21 in Automatic mode. Unnecessary parts of the acquired images can also be removed manually with simple mouse/joystick operation.



Smart Scan for Simple 3D Imaging

■ Automatic 3D Image Acquisition
Conventional 3D scanning requires complicated settings that are difficult for novice users. With the LEXT OLS4100's new Smart Scan mode, even first-time users can quickly acquire 3D images with a single click of a button. In addition to upper and lower limit settings, appropriate brightness level is automatically set up by the system based on the image to be captured, allowing even new users to obtain accurate height measurements and an optimized image.
3D Imaging



Automatic Brightness Control

Brightness Control on a Plane / Brightness Control with a Range of Height.

Greater Reduction of Acquisition Time

■ Improved Scanning Speed
The new Ultra-Fast mode allows scanned image acquisition at twice the speed of conventional Fast mode, and approximately nine times the speed of Fine mode. This makes it possible to measure micro-samples with very steep angles, such as the tip of a knife, which is difficult to observe due to fine Z-step movement and high magnification.



■ High-Speed Acquisition of Required Areas Only
The OLS4100 also comes with a Band Scan mode for measurement of limited target areas, providing measurement performance 1/8th faster than conventional modes.


Acquisition with a Full Scan Acquisition with Band Scan (1/8th )


■ New High-Speed Stitching Mode
Specify Target Areas from Wider-Area Stitched Images
As in macro mapping, the area to be observed can be specified from a wide area map. In Automatic mode, an area map can be automatically generated in roughly half the time it normally takes by setting a rectangular stitching size of up to 625 images. Observation can begin immediately once the target area is specified on the area map.



Stitching Area: Square (21x3) 63 Pieces Stitching Area: Circle (3 Points)


■ Manually Specifying Required Image Areas
In Live mode, the area to be observed can be selected manually by tracing the required region onscreen. This is ideal when the sample has an irregular shape.


■ Quick Image Acquisition
In Smart Scan mode, all it takes is the click of a button. As the location across the Z-axis is automatically adjusted, image acquisition in the Z-axis direction can be restricted to required areas only, for rapid high-power observation across a wide area.


Smart Scan Mode Conventional Acquisition Mode



Customizable Reports at the Touch of a Button
The OLS4100 generates reports at the touch of a button after measurement, and an edit function allows the operator to customize each report template. Copying and pasting measured results into a word processing/spreadsheet application is also quite simple, as is retrieving required images/reports from a database.




One-Click Solutions
A detailed user-designed wizard function eliminates the need for lengthy training and allows quick and easy operation by new operators.

MAIN UNIT
LSM Section Light Source/Detector Light Source: 405 nm Semiconductor Laser,
Detector: Photomultiplier
Total Magnification 108x – 17,280x
Zoom Optical Zoom: 1x – 8x
Measurement Planar Measurement Repeatability 100x: 3n-1=0.02 μm
Accuracy Measurement Value ±2%
Height Measurement System Revolving Nosepiece Vertical-Drive System
Stroke 10 mm
Scale Resolution 0.8 nm
Movement Resolution 10 nm
Display Resolution 1 nm
Repeatability 50x: n-1=0.012 μm
Accuracy 0.2+L/100 μm or Less (L=Measuring Length)
Color Observation Section Light Source/Detector Light Source: White LED,
Detector: 1/1.8-Inch 2-Megapixel Single-Panel CCD
Zoom Digital Zoom: 1x – 8x
Revolving Nosepiece Motorized BF Sextuple Revolving Nosepiece
Differential Interference Contrast Unit Differential Interference Contrast Slider: U-DICR,
Polarizing Plate Unit Built-In
Objective BF Plan Semi-apochromat 5x, 10x
LEXT-Dedicated Plan Apochromat 20x, 50x, 100x
Z Focusing Unit Stroke 100 mm
XY Stage 100x100 mm (Motorized Stage),
Option: 300x300 mm (Motorized Stage)